☆ Yσɠƚԋσʂ ☆@lemmy.ml to Technology@lemmy.mlEnglish · 11 days agoChina debuts first e-beam lithography tool for commercial use in chip milestonewww.scmp.comexternal-linkmessage-square2linkfedilinkarrow-up119arrow-down11file-text
arrow-up118arrow-down1external-linkChina debuts first e-beam lithography tool for commercial use in chip milestonewww.scmp.com☆ Yσɠƚԋσʂ ☆@lemmy.ml to Technology@lemmy.mlEnglish · 11 days agomessage-square2linkfedilinkfile-text
minus-squaresolrize@lemmy.mllinkfedilinkarrow-up2·11 days agoE-beam lithography has been around since the 1970s and it’s not that big a deal by today’s technological standards. Are they using the e-beam to write directly on the wafer instead of making masks? That gives them finer lines, but is slow.
E-beam lithography has been around since the 1970s and it’s not that big a deal by today’s technological standards. Are they using the e-beam to write directly on the wafer instead of making masks? That gives them finer lines, but is slow.